@inproceedings{inproceedings, title  = {{Strain relaxation induced local crystal tilts at Si/SiGe interfaces in cross-sectional transmission electron microscope specimens}},

 url = {{}},

 year = {{1995}},

 month = {{1}},

 author = {{Walther T and Boothroyd CB and Humphreys CJ}},

 volume = {{146}},

 journal = {{MICROSCOPY OF SEMICONDUCTING MATERIALS 1995}},

 pages = {{11-16}},

 note = {{Accessed on 2024/10/23}}}