TY  - CONF

T1  - Strain relaxation induced local crystal tilts at Si/SiGe interfaces in cross-sectional transmission electron microscope specimens

JO  - MICROSCOPY OF SEMICONDUCTING MATERIALS 1995

PY  - 1995/01/01

AU  - Walther T

AU  - Boothroyd CB

AU  - Humphreys CJ

ED  - Cullis AG

ED  - StatonBevan AE

VL  - 146

SP  - 11

EP  - 16

Y2  - 2024/10/23

ER  -