@article{article, title  = {{Characterization of a-SiN<inf>x</inf>:H layer: Bulk properties, interface with Si and solar cell efficiency}},

 url = {{}},

 year = {{2013}},

 month = {{4}},

 author = {{Lamers M and Butler K and Vullum PE and Harding J and Weeber A}},

 doi = {{10.1002/pssa.201200532}},

 volume = {{210}},

 journal = {{Physica Status Solidi (A) Applications and Materials Science}},

 issue = {{4}},

 pages = {{658-668}},

 note = {{Accessed on 2025/03/11}}}