@inproceedings{inproceedings, title  = {{Comparison of transmission electron microscopy mehods to measure layer thicknesses to sub-monolyer precision}},

 publisher = {{Springer}},

 url = {{}},

 year = {{2008}},

 month = {{1}},

 author = {{Walther T}},

 isbn = {{978-3-540-85225-4}},

 volume = {{2 (Materials Science)}},

 pages = {{377-378}},

 note = {{Accessed on 2024/10/23}}}