TY  - CONF

T1  - Comparison of transmission electron microscopy mehods to measure layer thicknesses to sub-monolyer precision

CY  - Berlin

PY  - 2008/01/01

AU  - Walther T

ED  - Richter S

ED  - Schwedt A

PB  - Springer

SN  - 978-3-540-85225-4

VL  - 2 (Materials Science)

SP  - 377

EP  - 378

Y2  - 2024/10/23

ER  -