@inproceedings{inproceedings, title  = {{Calibration of thickness-dependent k-factors for germanium X-ray lines to improve energy-dispersive X-ray spectroscopy of SiGe layers in analytical transmission electron microscopy}},

 publisher = {{Institute of Physics Publishing}},

 url = {{}},

 year = {{2013}},

 month = {{1}},

 author = {{Qiu Y and Nguyen VH and Dobbie A and Myronov M and Walther T}},

 doi = {{10.1088/1742-6596/471/1/012031}},

 volume = {{471}},

 journal = {{Journal of Physics: Conference Series}},

 pages = {{012031-1-012031-6}},

 note = {{Accessed on 2024/10/23}}}