TY - CONF T1 - Calibration of thickness-dependent k-factors for germanium X-ray lines to improve energy-dispersive X-ray spectroscopy of SiGe layers in analytical transmission electron microscopy CY - Bristol JO - Journal of Physics: Conference Series PY - 2013/01/01 AU - Qiu Y AU - Nguyen VH AU - Dobbie A AU - Myronov M AU - Walther T ED - Walther T ED - Hutchison JL DO - DOI: 10.1088/1742-6596/471/1/012031 PB - Institute of Physics Publishing VL - 471 SP - 012031 EP - 1 Y2 - 2024/10/23 ER -