TY  - CONF

T1  - Simulation of oxygen vacancies at the Si-SiO2 interface

JO  - RADIATION EFFECTS AND DEFECTS IN SOLIDS

PY  - 1995/01/01

AU  - Carniato S

AU  - Boureau G

AU  - Harding J

ED  - 

VL  - 134

IS  - 1-4

SP  - 179

EP  - 183

Y2  - 2024/12/22

ER  -