@article{article, title  = {{High speed nano-metrology.}},

 url = {{}},

 year = {{2011}},

 month = {{4}},

 author = {{Humphris ADL and Zhao B and Catto D and Howard-Knight JP and Kohli P and Hobbs JK}},

 doi = {{10.1063/1.3584935}},

 volume = {{82}},

 journal = {{Rev Sci Instrum}},

 issue = {{4}},

 pages = {{043710}},

 note = {{Accessed on 2024/12/22}}}