@inproceedings{inproceedings, title = {{Electron energy loss spectroscopic profiling of semiconductor hetero- and nano-structures: theory, implementation, applications}}, url = {{http://eprints.whiterose.ac.uk/137430/ }}, year = {{2003}}, month = {{1}}, author = {{Walther T}}, journal = {{MICROSCOPY OF SEMICONDUCTING MATERIALS 2003}}, issue = {{180}}, pages = {{27-32}}, note = {{Accessed on 2024/10/23}}}