@article{article, title  = {{The Effect of Surface States on Secondary Electron (SE) Dopant Contrast from Silicon p-n Junctions}},

 publisher = {{Cambridge University Press (CUP)}},

 url = {{}},

 year = {{2007}},

 month = {{6}},

 author = {{Chee AKW and Rodenburg C and Humphreys CJ}},

 doi = {{10.1557/proc-1026-c04-02}},

 volume = {{1026}},

 journal = {{MRS Proceedings}},

 note = {{Accessed on 2024/12/21}}}