@inproceedings{inproceedings, title  = {{TEM analysis of Si-passivated Ge-on-Si MOSFET structures for high performance PMOS device technology}},

 url = {{}},

 year = {{2010}},

 month = {{1}},

 author = {{Norris DJ and Ross IM and Cullis AG and Walther T and Myronov M and Dobbie A and Whall T and Parker EHC and Leadley DR and De Jaeger B and Lee W et al}},

 doi = {{10.1088/1742-6596/241/1/012044}},

 volume = {{241}},

 journal = {{Journal of Physics: Conference Series}},

 note = {{Accessed on 2024/12/21}}}