@article{article, title  = {{Defect photoluminescence from pulsed‐laser‐annealed ion‐implanted Si}},

 publisher = {{AIP Publishing}},

 url = {{}},

 year = {{1981}},

 month = {{1}},

 author = {{Skolnick MS and Cullis AG and Webber HC}},

 doi = {{10.1063/1.92405}},

 volume = {{38}},

 journal = {{Applied Physics Letters}},

 issue = {{6}},

 pages = {{464-466}},

 note = {{Accessed on 2025/03/11}}}