@article{article, title  = {{Manufacturability of split-gate transistor devices—initial results}},

 publisher = {{IOP Publishing}},

 url = {{}},

 year = {{2006}},

 month = {{4}},

 author = {{Yang Q-Z and Jones GAC and Kelly MJ and Beere H and Farrer I}},

 doi = {{10.1088/0268-1242/21/4/024}},

 volume = {{21}},

 journal = {{Semiconductor Science and Technology}},

 issue = {{4}},

 pages = {{558-564}},

 note = {{Accessed on 2025/03/10}}}