@article{article, title  = {{Site-specific dopant profiling in a scanning electron microscope using focused ion beam prepared specimens}},

 url = {{}},

 year = {{2006}},

 month = {{5}},

 author = {{Kazemian P and Twitchett AC and Humphreys CJ and Rodenburg C}},

 doi = {{10.1063/1.2207552}},

 volume = {{88}},

 journal = {{APPL PHYS LETT}},

 issue = {{21}},

 note = {{Accessed on 2024/12/21}}}