@inproceedings{inproceedings, title = {{Analysis of focused ion beam cut profiles by transmission electron microscopy}}, publisher = {{Publication Committee of IMC16}}, url = {{}}, year = {{2006}}, month = {{1}}, author = {{Walther T and Sehrbrock A and Quandt E}}, volume = {{2 (Instrumentation)}}, pages = {{1112-1112}}, note = {{Accessed on 2024/10/23}}}