@inproceedings{inproceedings, title = {{Quantification of the composition of silicon germanium/silicon structures by high-angle annular dark field imaging}}, url = {{}}, year = {{1997}}, month = {{1}}, author = {{Walther T and Humphreys CJ}}, journal = {{ELECTRON MICROSCOPY AND ANALYSIS 1997}}, issue = {{153}}, pages = {{303-306}}, note = {{Accessed on 2024/12/20}}}