@inproceedings{inproceedings, title  = {{Quantification of the composition of silicon germanium/silicon structures by high-angle annular dark field imaging}},

 url = {{}},

 year = {{1997}},

 month = {{1}},

 author = {{Walther T and Humphreys CJ}},

 journal = {{ELECTRON MICROSCOPY AND ANALYSIS 1997}},

 issue = {{153}},

 pages = {{303-306}},

 note = {{Accessed on 2024/10/23}}}