TY  - CONF

T1  - Quantification of the composition of silicon germanium/silicon structures by high-angle annular dark field imaging

JO  - ELECTRON MICROSCOPY AND ANALYSIS 1997

PY  - 1997/01/01

AU  - Walther T

AU  - Humphreys CJ

ED  - Rodenburg JM

IS  - 153

SP  - 303

EP  - 306

Y2  - 2024/12/20

ER  -