@article{article, title = {{Development of a cosputter-evaporation chamber for Fe-Ga films}}, url = {{}}, year = {{2008}}, month = {{7}}, author = {{Morley NA and Yeh SL and Rigby S and Javed A and Gibbs MRJ}}, doi = {{10.1116/1.2924416}}, volume = {{26}}, journal = {{J VAC SCI TECHNOL A}}, issue = {{4}}, pages = {{581-586}}, note = {{Accessed on 2024/12/20}}}