@article{article, title = {{Energy filtered scanning electron microscopy: Applications to dopant contrast}}, url = {{}}, year = {{2010}}, month = {{1}}, author = {{Rodenburg C and Jepson E and Inkson J and Bosch E and Chee W and Humphreys J}}, doi = {{10.1088/1742-6596/209/1/012053}}, volume = {{209}}, journal = {{Journal of Physics: Conference Series}}, note = {{Accessed on 2024/12/21}}}