@inproceedings{inproceedings, title  = {{EELS and ELNES studies of nano-scale nitride multilayers deposited by unbalanced magnetron sputtering}},

 url = {{}},

 year = {{2010}},

 month = {{1}},

 author = {{Seabourne CR and Ross IM and Rainforth WM and Scott AJ and Mendis BG and Eh Hovespian PE}},

 doi = {{10.1088/1742-6596/241/1/012046}},

 volume = {{241}},

 journal = {{Journal of Physics: Conference Series}},

 note = {{Accessed on 2024/12/21}}}