@inproceedings{inproceedings, title  = {{Quantitative doping contrast profiling of p-n junctions in Si with the scanning electron microscope}},

 url = {{}},

 year = {{2003}},

 month = {{1}},

 author = {{Kazemian P and Schonjahn C and Humphreys CJ}},

 journal = {{MICROSCOPY OF SEMICONDUCTING MATERIALS 2003}},

 issue = {{180}},

 pages = {{593-596}},

 note = {{Accessed on 2024/12/21}}}