TY  - CONF

T1  - Quantitative doping contrast profiling of p-n junctions in Si with the scanning electron microscope

JO  - MICROSCOPY OF SEMICONDUCTING MATERIALS 2003

PY  - 2003/01/01

AU  - Kazemian P

AU  - Schonjahn C

AU  - Humphreys CJ

ED  - Cullis AG

ED  - Midgley PA

IS  - 180

SP  - 593

EP  - 596

Y2  - 2024/12/21

ER  -