@article{article, title  = {{Measurement of the Al content in AlGaN epitaxial layers by combined energy-dispersive X-ray and electron energy-loss spectroscopy in a transmission electron microscope}},

 publisher = {{Wiley}},

 url = {{}},

 year = {{2012}},

 month = {{1}},

 author = {{Amari H and Kappers MJ and Humphreys CJ and Cheze C and Walther T}},

 doi = {{10.1002/pssc.201100165}},

 volume = {{9}},

 journal = {{Physica Status Solidi. C: Current Topics in Solid State Physics}},

 issue = {{3-4}},

 pages = {{1079-1082}},

 note = {{Accessed on 2024/10/23}}}