@article{article, title = {{Transmission electron microscopy of epitaxial semiconductor materials and devices}}, publisher = {{IOP Publishing}}, url = {{http://dx.doi.org/10.1088/1361-6463/ad8a6b }}, year = {{2024}}, month = {{10}}, author = {{Dong J and Bai H and Deng Y and Liu S and Wang X and Qiu Y and Shi Y and Walther T}}, doi = {{10.1088/1361-6463/ad8a6b}}, journal = {{Journal of Physics D: Applied Physics}}, note = {{Accessed on 2024/12/20}}}