@article{article, title = {{Ultrathin, Substrate-Integrated, and Self-Healing Nanocapacitors With Low-Leakage Currents and High-Operating Frequencies}}, publisher = {{Institute of Electrical and Electronics Engineers (IEEE)}}, url = {{http://dx.doi.org/10.1109/tcpmt.2016.2602213 }}, year = {{2016}}, month = {{9}}, author = {{Chakraborti P and Sharma H and Pulugurtha MR and Rataj K-P and Schnitter C and Neuhart N and Jain S and Gandhi S and Tummala RR}}, doi = {{10.1109/tcpmt.2016.2602213}}, volume = {{6}}, journal = {{IEEE Transactions on Components, Packaging and Manufacturing Technology}}, issue = {{12}}, pages = {{1776-1784}}, note = {{Accessed on 2024/12/21}}}