@inproceedings{inproceedings, title  = {{Device quality SiO<inf>2</inf> films by liquid phase deposition (LPD) at 48°C}},

 url = {{}},

 year = {{2011}},

 month = {{2}},

 author = {{Manhas M and Pease TJ and Cross R and Bose SC and Oxley DP and De Souza MM and Sankara Narayanan EM}},

 doi = {{10.1557/proc-716-b7.9}},

 volume = {{716}},

 journal = {{Materials Research Society Symposium - Proceedings}},

 pages = {{317-323}},

 note = {{Accessed on 2024/10/23}}}