@inproceedings{inproceedings, title  = {{The dependence of the growth rate of LPCVD grown SiGe quantum wells on the Ge composition and the layer thickness}},

 publisher = {{The Committee of European Societies of Microscopy}},

 url = {{}},

 year = {{-0001}},

 month = {{11}},

 author = {{Walther T and Boothroyd CB and Humphreys CJ}},

 volume = {{1}},

 pages = {{317-318}},

 note = {{Accessed on 2024/10/23}}}