@article{article, title  = {{A Monte Carlo study of the kickout mechanism of boron diffusion in silicon}},

 url = {{}},

 year = {{1996}},

 month = {{3}},

 author = {{De Souza MM and Amaratunga GAJ}},

 doi = {{10.1063/1.361169}},

 volume = {{79}},

 journal = {{Journal of Applied Physics}},

 issue = {{5}},

 pages = {{2418-2425}},

 note = {{Accessed on 2025/03/11}}}