@article{article, title  = {{Diffusion and surface segregation in thin SiGe/Si layers studied by scanning transmission electron microscopy}},

 url = {{}},

 year = {{1997}},

 month = {{1}},

 author = {{Walther T and Humphreys CJ and Robbins DJ}},

 doi = {{10.4028/www.scientific.net/DDF.143-147.1135}},

 volume = {{143-147}},

 journal = {{Defect and Diffusion Forum}},

 pages = {{1135-1140}},

 note = {{Accessed on 2024/10/23}}}