TY  - JOUR

T1  - Diffusion and surface segregation in thin SiGe/Si layers studied by scanning transmission electron microscopy

JO  - Defect and Diffusion Forum

PY  - 1997/01/01

AU  - Walther T

AU  - Humphreys CJ

AU  - Robbins DJ

ED  - 

DO  - DOI: 10.4028/www.scientific.net/DDF.143-147.1135

VL  - 143-147

SP  - 1135

EP  - 1140

Y2  - 2024/10/23

ER  -