@article{article, title  = {{The importance of ions in low pressure PECVD plasmas}},

 publisher = {{Frontiers Media SA}},

 url = {{http://dx.doi.org/10.3389/fphy.2015.00003 }},

 year = {{2015}},

 month = {{2}},

 author = {{Michelmore A and Whittle JD and Short RD}},

 doi = {{10.3389/fphy.2015.00003}},

 volume = {{3}},

 journal = {{Frontiers in Physics}},

 note = {{Accessed on 2024/12/22}}}