TY  - CONF

T1  - Structure sensitive hydrogenation effects in polysilicon high voltage thin film transistors

JO  - Materials Research Society Symposium - Proceedings

PY  - 1999/01/01

AU  - Clough FJ

AU  - Xu YZ

AU  - Narayanan EMS

AU  - Cross R

ED  - 

DO  - DOI: 10.1557/proc-557-635

VL  - 557

SP  - 635

EP  - 640

Y2  - 2024/12/20

ER  -