TY  - JOUR

T1  - Fabrication of v-groove gratings in InP by inductively coupled plasma etching with SiCl4/Ar

JO  - SEMICOND SCI TECH

PY  - 2006/01/01

AU  - Kennedy K

AU  - Groom KM

AU  - Hogg RA

ED  - 

DO  - DOI: 10.1088/0268-1242/21/1//L01

VL  - 21

IS  - 1

SP  - L1

EP  - L5

Y2  - 2024/12/20

ER  -