@article{article, title  = {{The measurement and control of the ion energy distribution function at a surface in an RF plasma}},

 publisher = {{IOP Publishing}},

 url = {{http://dx.doi.org/10.1088/0957-0233/11/12/312 }},

 year = {{2000}},

 month = {{11}},

 author = {{Barton D and Heason DJ and Short RD and Bradley JW}},

 doi = {{10.1088/0957-0233/11/12/312}},

 volume = {{11}},

 journal = {{Measurement Science and Technology}},

 issue = {{12}},

 pages = {{1726-1731}},

 note = {{Accessed on 2024/12/22}}}