@article{article, title  = {{Co-Clustering Via Nanochannel-Membrane Modulated Ion Implantation into Si3N4 Observed By Plan-View Aberration-Corrected STEM And EELS}},

 publisher = {{Cambridge University Press (CUP)}},

 url = {{}},

 year = {{2012}},

 month = {{1}},

 author = {{Guan W and Bhatta U and Ross IM and Ghatak J and Moebus G and Peng N}},

 doi = {{10.1017/s1431927612003765}},

 volume = {{18}},

 journal = {{Microscopy and Microanalysis}},

 issue = {{S2}},

 pages = {{382-383}},

 note = {{Accessed on 2024/12/21}}}