TY  - JOUR

T1  - Co-Clustering Via Nanochannel-Membrane Modulated Ion Implantation into Si3N4 Observed By Plan-View Aberration-Corrected STEM And EELS

JO  - Microscopy and Microanalysis

PY  - 2012/01/01

AU  - Guan W

AU  - Bhatta U

AU  - Ross IM

AU  - Ghatak J

AU  - Moebus G

AU  - Peng N

ED  - 

DO  - DOI: 10.1017/s1431927612003765

PB  - Cambridge University Press (CUP)

VL  - 18

IS  - S2

SP  - 382

EP  - 383

Y2  - 2024/12/21

ER  -