@article{article, title  = {{Accurate calibration for the quantification of the Al content in AlGaN epitaxial layers by energy-dispersive X-ray spectroscopy in a Transmission Electron Microscope}},

 url = {{}},

 year = {{2011}},

 month = {{1}},

 author = {{Amari H and Lari L and Zhang HY and Geelhaar L and Cheze C and Kappers MJ and McAleese C and Humphreys CJ and Walther T and IOP}},

 doi = {{10.1088/1742-6596/326/1/012028}},

 volume = {{326}},

 journal = {{17TH INTERNATIONAL CONFERENCE ON MICROSCOPY OF SEMICONDUCTING MATERIALS 2011}},

 note = {{Accessed on 2024/10/23}}}