TY  - JOUR

T1  - Accurate calibration for the quantification of the Al content in AlGaN epitaxial layers by energy-dispersive X-ray spectroscopy in a Transmission Electron Microscope

JO  - 17TH INTERNATIONAL CONFERENCE ON MICROSCOPY OF SEMICONDUCTING MATERIALS 2011

PY  - 2011/01/01

AU  - Amari H

AU  - Lari L

AU  - Zhang HY

AU  - Geelhaar L

AU  - Cheze C

AU  - Kappers MJ

AU  - McAleese C

AU  - Humphreys CJ

AU  - Walther T

AU  - IOP

ED  - 

DO  - DOI: 10.1088/1742-6596/326/1/012028

VL  - 326

Y2  - 2024/10/23

ER  -