@article{article, title = {{Impact of the size 4 cluster on low temperature indium diffusion in silicon}}, url = {{}}, year = {{2005}}, month = {{6}}, author = {{De Souza MM and Chakravarthi S and Jain A}}, doi = {{10.1088/0953-8984/17/22/003}}, volume = {{17}}, journal = {{JOURNAL OF PHYSICS-CONDENSED MATTER}}, issue = {{22}}, pages = {{S2165-S2170}}, note = {{Accessed on 2024/12/20}}}