@inproceedings{inproceedings, title = {{TEM characterisation of nanoindentation deformation in Cu-Ti thin films sectioned by FIB}}, url = {{}}, year = {{2002}}, month = {{1}}, author = {{Mobus G and Inkson BJ and Bobji MS and Kraft O and Wagner T}}, volume = {{1}}, pages = {{1021}}, note = {{Accessed on 2024/12/22}}}