@inproceedings{inproceedings, title  = {{High resolution dopant profiling in the SEM, image widths and surface band-bending - art. no. 012033}},

 url = {{}},

 year = {{2008}},

 month = {{1}},

 author = {{Chee KWA and Rodenburg C and Humphreys CJ}},

 volume = {{126}},

 journal = {{EMAG: ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2007}},

 pages = {{12033-12033}},

 note = {{Accessed on 2025/04/22}}}