@inproceedings{inproceedings, title = {{Calibration of thickness-dependent k-factors of Germanium X-ray lines for improved analytical transmission electron microscopy of SiGe layers}}, publisher = {{Royal Microscopical Society}}, url = {{}}, year = {{2012}}, month = {{9}}, author = {{Qiu Y and Norris DJ and Walther T}}, isbn = {{978-0-9502463-6-9}}, volume = {{2}}, issue = {{Physical Sciences: Tools and Techniques}}, pages = {{643-644}}, note = {{Accessed on 2024/10/23}}}