TY  - CONF

T1  - Calibration of thickness-dependent k-factors of Germanium X-ray lines for improved analytical transmission electron microscopy of SiGe layers

CY  - Oxford

PY  - 2012/09/01

AU  - Qiu Y

AU  - Norris DJ

AU  - Walther T

ED  - Stokes DJ

ED  - Hutchison JL

PB  - Royal Microscopical Society

SN  - 978-0-9502463-6-9

VL  - 2

IS  - Physical Sciences: Tools and Techniques

SP  - 643

EP  - 644

Y2  - 2024/10/23

ER  -