TY  - CONF

T1  - A new double epitaxial layer dielectric isolation technology for HVICs

JO  - [1993] Proceedings of the 5th International Symposium on Power Semiconductor Devices and ICs

PY  - 1993/01/01

AU  - Narayanan EMS

AU  - Amaratunga G

AU  - Milne WI

ED  - 

DO  - DOI: 10.1109/ispsd.1993.297114

PB  - IEEE

Y2  - 2024/10/23

ER  -