@article{article, title  = {{New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope}},

 publisher = {{Cambridge University Press (CUP)}},

 url = {{http://eprints.whiterose.ac.uk/127985/ }},

 year = {{2018}},

 month = {{4}},

 author = {{Stehling NA and Masters R and Zhou Y and O'Connell R and Holland C and Zhang H and Rodenburg C}},

 doi = {{10.1557/mrc.2018.75}},

 journal = {{MRS Communications}},

 note = {{Accessed on 2024/12/22}}}