TY - JOUR T1 - New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope JO - MRS Communications UR - http://eprints.whiterose.ac.uk/127985/ PY - 2018/04/23 AU - Stehling NA AU - Masters R AU - Zhou Y AU - O'Connell R AU - Holland C AU - Zhang H AU - Rodenburg C ED - DO - DOI: 10.1557/mrc.2018.75 PB - Cambridge University Press (CUP) Y2 - 2024/10/23 ER -