@inproceedings{inproceedings, title = {{Auger depth profile analysis and EFTEM analysis of annealed Ti/Al-contacts on Si-doped GaN}}, publisher = {{Press Point}}, url = {{}}, year = {{2000}}, month = {{1}}, author = {{Pidun M and Karduck P and Mayer J and Heime K and Schineller B and Walther T}}, pages = {{172-173}}, note = {{Accessed on 2024/10/23}}}