@article{article, title  = {{Electron energy loss spectroscopy of nano-scale CrAlYN/CrN-CrAlY(O)N/Cr(O)N multilayer coatings deposited by unbalanced magnetron sputtering}},

 url = {{}},

 year = {{2010}},

 month = {{7}},

 author = {{Ross IM and Rainforth WM and Seabourne CR and Scott AJ and Wang P and Mendis BG and Bleloch AL and Reinhard C and Hovsepian PE}},

 doi = {{10.1016/j.tsf.2010.03.012}},

 volume = {{518}},

 journal = {{THIN SOLID FILMS}},

 issue = {{18}},

 pages = {{5121-5127}},

 note = {{Accessed on 2024/12/22}}}