@article{article, title  = {{An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/ oxygen plasmas}},

 publisher = {{Springer Science and Business Media LLC}},

 url = {{http://dx.doi.org/10.1007/bf00372203 }},

 year = {{1996}},

 month = {{4}},

 author = {{Alexander MR and Short RD and Jones FR and Stollenwerk M and Zabold J and Michaeli W}},

 doi = {{10.1007/bf00372203}},

 volume = {{31}},

 journal = {{Journal of Materials Science}},

 issue = {{7}},

 pages = {{1879-1885}},

 note = {{Accessed on 2024/12/22}}}